In the field of semiconductor manufacturing, sub-micron precision is the key to ensuring chip performance, and the (ZHHIMG®) granite base, with its material properties, precise processing and innovative design, has become the core guarantee for achieving this precision.
From the perspective of material properties, the black granite selected by ZHHIMG® has a density of approximately 3100kg/m³, with a dense internal structure. This high density endows it with outstanding stability and rigidity. During the operation of semiconductor equipment, the rotation of motors and the movement of mechanical components inside the equipment will generate vibrations. The granite base can effectively absorb over 90% of the vibration energy, significantly reducing the impact of vibration on the accuracy of the equipment. Meanwhile, its extremely low coefficient of thermal expansion enables it to keep its deformation within a very small range when the ambient temperature fluctuates, providing a stable support foundation for semiconductor equipment and preventing the displacement of equipment components due to temperature changes, which could affect accuracy.
In terms of processing and manufacturing, the ZHHIMG® factory adopts international advanced processing equipment and has four super-large grinding machines (each machine costs over 500,000usd), which can perform high-precision grinding on granite. Through five-axis linkage CNC machining and other processes, the flatness of the machine base can reach the nanometer level, providing an ultra-flat reference surface for the installation of semiconductor equipment and ensuring the precise positioning of each component of the equipment. Moreover, the constant temperature and humidity workshop (covering an area of 10,000 square meters) provides a stable environment for the processing. The 500mm wide and 2000mm deep anti-vibration trenches around it, as well as the silent cranes, effectively isolate external vibration interference and ensure the processing accuracy of the machine base.
In addition, ZHHIMG® also has a strong customization capability. For the special requirements of semiconductor equipment, precise installation holes and cable trays can be prefabricated to achieve perfect compatibility between the equipment and the base. At the same time, in combination with world-class metrology and testing equipment such as the German Mahr minute gauge (with an accuracy of 0.5um) and the Swiss WYLER electronic level, the machine base is strictly inspected and calibrated to ensure that each machine base can meet the strict requirements of semiconductor equipment for sub-micron level accuracy.
It is precisely the combination of these advantages that makes the ZHHIMG® granite base a reliable choice for achieving sub-micron precision in semiconductor equipment, helping semiconductor manufacturing move towards higher precision fields.
Post time: Jun-18-2025