In semiconductor and optoelectronic manufacturing equipment, granite is mainly used in key parts such as precision motion platforms, guide rail bases, vibration isolation support structures, and optical component installation substrates. These parts have extremely high requirements for precision, stability and environmental tolerance. The characteristics of granite can precisely meet the strict demands of the semiconductor and optoelectronic industries. The following is the analysis of specific application scenarios and advantages:
I. Main Application Parts
Precision motion platforms (such as wafer platforms for photolithography machines and bonding machines)
It is used to carry precision components such as wafers and optical lenses, achieving translation and rotation movements with nanoscale accuracy.
Typical equipment: workpiece table of photolithography machine, positioning platform of measuring equipment.
Guide rail base and frame structure
As the installation base for linear guides and air flotation guides, it supports the core motion mechanism of the equipment.
Typical equipment: mechanical frames of semiconductor packaging equipment and optical inspection instruments.
Vibration isolation support and stabilizing structure
It is used to isolate external vibrations (such as vibrations from the factory floor or during equipment operation), ensuring the stability of optical systems or precision machinery.
Typical scenarios: Base support for optical microscopes and laser interferometers.
Optical component mounting substrate
Fix optical devices such as mirrors, prisms and lasers to ensure the long-term stability of the alignment accuracy of the optical path system.
Typical equipment: Optoelectronic packaging equipment, optical fiber coupling systems.
Post time: May-29-2025