In the precise chain of semiconductor manufacturing, the wafer transfer system is like the "lifeline of the chip production line", and its stability and accuracy directly determine the yield rate of chips. The new generation of wafer transfer systems revolutionarily combines linear motors with granite bases, and the unique advantages of granite materials are precisely the core code to unlock high-performance transmission.
Granite base: Building a "rock-solid foundation" for stable transmission
Granite, having undergone hundreds of millions of years of geological refinement, features dense and uniform internal mineral crystallization. This natural characteristic makes it an ideal base material for wafer transfer systems. In the complex environment of semiconductor cleanrooms, granite, with its ultra-low coefficient of thermal expansion (only 5-7 ×10⁻⁶/℃), can resist the heat generated during equipment operation and the influence of environmental temperature changes, ensuring the stability of the base size and avoiding the transmission path deviation caused by thermal deformation. Its outstanding vibration damping performance can quickly absorb the mechanical vibrations generated during the start-up, shutdown and acceleration of linear motors, as well as the external interferences brought by the operation of other equipment in the workshop, providing a stable platform with "zero shake" for wafer transmission.
Meanwhile, the chemical stability of granite ensures that it does not corrode or rust in semiconductor workshops where acid and alkali reagents are volatile and high cleanliness is required, thus avoiding the impact on transmission accuracy due to material aging or pollutant adsorption. The smooth and dense surface characteristics can more effectively reduce dust adhesion, meeting the strict dust-free standards of clean rooms and eliminating the risk of wafer contamination from the root.
The "golden partnership" effect of linear motors and granite
Linear motors, with their characteristics of no mechanical transmission clearance, high acceleration and high response speed, endow wafer transmission with the advantages of "fast, accurate and stable". The granite base provides a solid and reliable support platform for it. The two work together to achieve a leap in performance. When the linear motor drives the wafer carrier to run on the granite base track, the strong rigidity and stability of the base ensure the efficient transmission of the motor driving force, avoiding force loss or transmission lag caused by base deformation.
Driven by the demand for nanoscale precision, linear motors can achieve sub-micron-level displacement control. The high-precision processing characteristics of granite bases (with flatness errors controlled within ±1μm) perfectly match the precise control of linear motors, jointly ensuring that the positioning error during wafer transmission is less than ±5μm. Whether it is high-speed shuttling among various process equipment or precise parking for wafer handover, the combination of linear motors and granite bases can ensure "zero deviation and zero jitter" in wafer transmission.
Industry practice verification: Dual improvement in efficiency and yield rate
After upgrading its wafer transfer system, a leading global semiconductor enterprise adopted a linear motor + granite base solution, which increased the wafer transfer efficiency by 40%, reduced the occurrence rate of faults such as collision and offset during the transfer process by 85%, and improved the overall yield rate of chips by 6%. Behind the data lies the guarantee of transmission stability provided by the granite base and the high-speed and precise synergy effect of the linear motor, which significantly reduces the loss and error in the wafer transmission process.
From material properties to precision manufacturing, from performance advantages to practical verification, the combination of linear motors and granite bases has redefined the standards of wafer transfer systems. In the future when semiconductor technology advances towards 3nm and 2nm processes, granite materials will surely continue to inject strong impetus into the industry's development with their irreplaceable advantages.
Post time: May-14-2025