precision surface plate
1. Wafer inspection base: Provides an absolute level reference plane for wafer thickness measurement and surface defect analysis.
2. Structural components for lithography/etching equipment: Serve as the base or column of a precision motion platform, supporting high-precision positioning under high-frequency reciprocating motion.
3. Chip packaging and die bonding reference: In precision die bonding machines, it offers a high-hardness, wear-resistant work surface to ensure packaging accuracy.
4. CMM platform: Provides a high-standard geometric tolerance inspection environment for semiconductor molds and core components.
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Model |
Details |
Model |
Details |
|
Size |
Custom |
Application |
CNC, Laser, CMM... |
|
Condition |
New |
After-sales Service |
Online supports, Onsite supports |
|
Origin |
Jinan City |
Material |
Black Granite |
|
Color |
Black / Grade 1 |
Brand |
ZHHIMG |
|
Precision |
0.001mm |
Weight |
≈3.05g/cm3 |
|
Standard |
DIN/ GB/ JIS... |
Warranty |
1year |
|
Packing |
Export Plywood CASE |
After Warranty Service |
Video technical support, Online support, Spare parts, Field mai |
|
Payment |
T/T, L/C... |
Certificates |
Inspection Reports/ Quality Certificate |
|
Keyword |
Granite Surface Plate; Granite Measuring; Granite Machine Parts; Precision Granite |
Certification |
CE, GS, ISO, SGS, TUV... |
|
Delivery |
EXW; FOB; CIF; CFR; DDU; CPT... |
Drawings’ format |
CAD; STEP; PDF... |
1. Nanometer-level flatness and stability:Natural granite achieves 000-grade (AA) flatness after precision grinding. Its high damping absorbs micro-vibrations, ensuring stable wafer handling.
2. Low thermal expansion:Granite’s coefficient of linear expansion is far lower than metal’s—minimizing thermal drift and maintaining measurement consistency in cleanroom environments.
3. Non-magnetic and insulating:Naturally non-magnetic and electrically insulating, granite eliminates electromagnetic interference—ideal for SEM, ultrasonic testing, and other sensitive electronics.
4. Optimized for air bearings:Its dense, smooth surface provides ideal support for air-bearing motion—enabling frictionless, sub-micron scanning with long-term reliability.
We use various techniques during this process:
● Optical measurements with autocollimators
● Laser interferometers and laser trackers
● Electronic inclination levels (precision spirit levels)
1. Documents together with products: Inspection reports + Calibration reports(measuring devices) + Quality Certificate + Invoice + Packing List + Contract + Bill of Lading(or AWB).
2. Special Export Plywood Case: Export fumigation-free wooden box.
3. Delivery:
|
Ship |
Qingdao port |
Shenzhen port |
TianJin port |
Shanghai port |
... |
|
Train |
XiAn Station |
Zhengzhou Station |
Qingdao |
... |
|
|
Air |
Qingdao Airport |
Beijing Airport |
Shanghai Airport |
Guangzhou |
... |
|
Express |
DHL |
TNT |
Fedex |
UPS |
... |
1. We will offer technical supports for assembly, adjustment, maintain.
2. Offering the manufacturing &inspection videos from selecting material to delivery, and customers can control and know every detail at anytime anywhere.
QUALITY CONTROL
If you can’t measure something, you can’t understand it!
If you can’t understand it.you cant control it!
If you can’t control it, you can’t improve it!
More information please click here: ZHONGHUI QC
ZhongHui IM, your partner of metrology, help you succeed easily.
Our Certificates & Patents:
ISO 9001, ISO45001, ISO14001, CE, AAA Integrity Certificate， AAA-level enterprise credit certificate…
Certificates and Patents are an expression of a company’s strength. It’s society’s recognition of the company.
More certificates please click here: Innovation & Technologies – ZHONGHUI INTELLIGENT MANUFACTURING (JINAN) GROUP CO., LTD (zhhimg.com)
