Ultra-Precision Granite Base for Wafer Inspection & Metrology

1. Superior Material Science: ZHHIMG® Black Granite

Unlike standard granite or, worse, lower-grade marble used by less scrupulous manufacturers, ZHHIMG bases are constructed exclusively from our proprietary ZHHIMG® Black Granite.

●  Exceptional Density: Our material boasts an impressive density of ≈ 3100 kg/m³, superior to many conventional black granites from Europe and the Americas.

●  Thermal Stability: The high density and minimal water absorption ensure superior dimensional stability, drastically reducing the impact of thermal drift during critical inspection cycles.

●  Vibration Damping: The natural mineral structure provides outstanding internal damping, essential for isolating sensitive optics and sensors from external vibration.

2. Unrivaled Manufacturing & Assembly Capability

Our commitment to precision is summarized by our core belief: "The precision business can't be too demanding."

●  Master Craftsmanship: Our bases are hand-lapped by master technicians, many with over 30 years of experience, who can achieve surface flatness and parallelism down to the nanometer level—precision verified by Renishaw Laser Interferometers and WYLER Electronic Levels.

●  Controlled Environment: Machining and final assembly are conducted within our 10,000 m² Temperature- and Humidity-Controlled Cleanroom (simulating strict semiconductor fab conditions). This facility features a 1000 mm thick concrete foundation and 2000 mm deep anti-vibration trenches, ensuring a truly stable metrology environment.

3. Integrated Precision Design (As Shown in Image)

The base is typically provided as a complex assembly, often including:

●  L-Shaped/Gantry Structures: Designed to support the vertical motion (Z-axis) of imaging heads, ensuring orthogonality and geometric accuracy.

●  Precision Grooves & Inserts: Pre-machined surfaces with threaded steel inserts and precision dowel holes for mounting air bearings, linear motors (XY Table), vision systems, and guide rails (THK, HIWIN, Rexroth).

●  Customization: We specialize in large-scale machining, capable of delivering monolithic granite bases up to 20m in length and 100 tons in weight, tailored precisely to your equipment envelope.