custom granite base for semiconductor equipment
• Zero Thermal Deformation: Granite's thermal expansion coefficient is only 1/3 that of steel, maintaining sub-micron dimensional stability even in environments with ±5℃ temperature fluctuations.
• Superior Vibration Damping: The internal micro-crystalline structure effectively absorbs high-frequency vibrations, preventing resonance from interfering with measurement results.
• Rust-Free & Corrosion Resistant: Requires no oil coating for maintenance, making it suitable for special conditions like cleanrooms and acidic/alkaline environments.
• Traceable High Precision: Every component is calibrated with a laser interferometer before leaving the factory, accompanied by an inspection report compliant with international standards.
• High Customizability: From simple plates to complex polyhedra with air flotation grooves or T-slots, we can manufacture precisely according to your drawings.
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Model |
Details |
Model |
Details |
|
Size |
Custom |
Application |
CNC, Laser, CMM... |
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Condition |
New |
After-sales Service |
Online supports, Onsite supports |
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Origin |
Jinan City |
Material |
Black Granite |
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Color |
Black / Grade 1 |
Brand |
ZHHIMG |
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Precision |
0.001mm |
Weight |
≈3.05g/cm3 |
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Standard |
DIN/ GB/ JIS... |
Warranty |
1year |
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Packing |
Export Plywood CASE |
After Warranty Service |
Video technical support, Online support, Spare parts, Field mai |
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Payment |
T/T, L/C... |
Certificates |
Inspection Reports/ Quality Certificate |
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Keyword |
Granite Machine Base; Granite Mechanical Components; Granite Machine Parts; Precision Granite |
Certification |
CE, GS, ISO, SGS, TUV... |
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Delivery |
EXW; FOB; CIF; CFR; DDU; CPT... |
Drawings’ format |
CAD; STEP; PDF... |
- • Semiconductor Lithography Machine Base: During wafer exposure, the granite base effectively isolates external vibrations and temperature fluctuations, ensuring overlay errors remain <2nm.
- • CMM Worktable: As the moving reference plane for a CMM, its long-term stability keeps repeat measurement accuracy within 0.5μm.
- • Precision Optical Assembly Platform: Provides an absolutely flat mounting reference during lens assembly, preventing optical axis misalignment caused by base deformation.
We use various techniques during this process:
● Optical measurements with autocollimators
● Laser interferometers and laser trackers
● Electronic inclination levels (precision spirit levels)
1. Documents together with products: Inspection reports + Calibration reports(measuring devices) + Quality Certificate + Invoice + Packing List + Contract + Bill of Lading(or AWB).
2. Special Export Plywood Case: Export fumigation-free wooden box.
3. Delivery:
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Ship |
Qingdao port |
Shenzhen port |
TianJin port |
Shanghai port |
... |
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Train |
XiAn Station |
Zhengzhou Station |
Qingdao |
... |
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|
Air |
Qingdao Airport |
Beijing Airport |
Shanghai Airport |
Guangzhou |
... |
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Express |
DHL |
TNT |
Fedex |
UPS |
... |
Q: Is granite more prone to breaking than metal?
A: No. Although granite is more brittle than metal, its compressive strength exceeds 250MPa. Furthermore, the structure is optimized via Finite Element Analysis (FEA) during the design phase to distribute stress, ensuring a lifespan far exceeding metal bases under normal use.
Q: How can I tell if a granite component is qualified?
A: Focus on three key points: 1) Whether the material is pure "Jinan Blue" granite, 2) Whether the flatness meets the specified grade, and 3) Whether there is a calibration certificate from an authoritative institution. All our products meet these three requirements.
Q: What is the typical lead time for customization?
A: Standard parts are available in stock; non-standard customization typically takes 2–6 weeks depending on complexity. We have large-scale CNC grinders and a skilled hand-lapping team to quickly respond to urgent needs.
QUALITY CONTROL
If you can’t measure something, you can’t understand it!
If you can’t understand it.you cant control it!
If you can’t control it, you can’t improve it!
More information please click here: ZHONGHUI QC
ZhongHui IM, your partner of metrology, help you succeed easily.
Our Certificates & Patents:
ISO 9001, ISO45001, ISO14001, CE, AAA Integrity Certificate， AAA-level enterprise credit certificate…
Certificates and Patents are an expression of a company’s strength. It’s society’s recognition of the company.
More certificates please click here: Innovation & Technologies – ZHONGHUI INTELLIGENT MANUFACTURING (JINAN) GROUP CO., LTD (zhhimg.com)
